Measurement/Inspection/Analysis
One-shot 3D form measurement system(Being used for R&D in Supporting Industry Program)
| Capability | Resolution 0.1μm |
|---|---|
| Numbers | 2 units |
| Maker | KEYENCE |
Height and flatness measurement system
| Capability | Resolution 0.3μm |
|---|---|
| Numbers | 1 unit |
| Maker | KEYENCE |
dimension measurement system
| Capability | High-precision mode Repeatability ±0.5μm, Measurement accuracy ±2.0μm |
|---|---|
| Numbers | 4 units |
| Maker | KEYENCE |
3D Coordinate measuring machine(large-size)
| Capability | Precision:2.6＋3.0Ｌ/1000≦4.9μm |
|---|---|
| Numbers | 2 units |
| Maker | TOKYO SEIMITSU |
Profiling measurement equipment
| Capability | Measurement precision:±0.25% |
|---|---|
| Numbers | 5 units |
| Maker | TOKYO SEIMITSU |
Projection equipment
| Capability | Measurement precision:4＋（L/25）μｍ(V24) |
|---|---|
| Numbers | V24model 2units、V20model 1unit、V16model 4units、V12model 4units |
| Maker | Nikon |
Circumference measurement equipment
| Capability | Measurement precision:0.05+6H/10000μm |
|---|---|
| Numbers | 3 units |
| Maker | TOKYO SEIMITSU |
Metal particle detecter
| Capability | Measurement precision:resolution capability 1.283μｍ |
|---|---|
| Numbers | 1 unit |
| Maker | NIRECO |
Eddy current fraw detecter
| Capability | Measurement precision: detects more than φ3.0 sized through-hole, cut of the depth more than 50μｍ |
|---|---|
| Numbers | 10 units |
| Maker | ibg、etc. |
X-ray fluorescence equipment
| Capability | Measurement range:13Ａl～92Ｕ |
|---|---|
| Numbers | 1 unit |
| Maker | SHIMADZU |
